发明名称 ELECTRODE FOR MACHINING
摘要 <p>PURPOSE:To prevent dropping of machining speed and occurrence of variation in machining quantity by forming the supply path for reaction gas within an electrode for supplying the entire machining area with reaction gas of constant amount. CONSTITUTION:The conductive thin wire of a wire electrode 3 is provided with a gas supply path 5 within it which extends through it in the longitudinal direction. On the side approximately facing a machined surface 6 of a work 2, multiple squirt holes 7 penetrating through to the gas supply path 5 are provided. The spacings between squirt holes 7 and their diameters are so set that the machining speed be constant in the longitudinal direction of the wire electrode 3. A buffer tank 8 is provided in a supporting bracket 4, and it is fixed to an end part of the wire electrode 3 so that the gas supply path 5 runs through it. The supporting bracket 4 is provided with a gas supply port 9, and the atmosphere gas consisting of reaction gas and inactive gas is supplied in the buffer tank 8 by a gas supply means. Thus, a constant amount of reaction gas is supplied at all times for stabilized machining speed.</p>
申请公布号 JPH0685059(A) 申请公布日期 1994.03.25
申请号 JP19920259138 申请日期 1992.09.01
申请人 YUUHA MIKAKUTOU SEIMITSU KOGAKU KENKYUSHO:KK;MORI YUZO 发明人 MORI YUZO
分类号 H01L21/302;H01L21/301;H01L21/3065;H01L21/78;(IPC1-7):H01L21/78 主分类号 H01L21/302
代理机构 代理人
主权项
地址