| 摘要 |
1275091 Semi-conductor device SEMICONDUCTOR RESEARCH FOUNDATION 1 Aug 1969 [1 Aug 1968] 38791/69 Heading H1K A transit time oscillator includes a junction which is reverse biased in operation so that carriers are injected by the tunnel effect, and transit a space charge region associated with the junction. In a first embodiment, Fig. 1 (not shown), a PNIN or NPIP device is constructed so that carriers are injected into the I type region by the PN junction by virtue of the tunnel effect which predominates over any avalanche effect present. In an example, a high resistivity P type layer is epitaxially deposited on a P type Si substrate doped with B which is then diced and an alloy of Ag, Pb, Sb and Al placed on the epitaxial layer and alloy diffused to produce the required structure. The substrate is soldered to a N-plated Mo body by means of an Al-Si foil. The device is placed in a cavity resonator and operated by applying pulses which reverse bias the PN junction. In a second example, a P type high resistivity layer is epitaxially deposited on a (100) surface of a P type GaAs substrate doped with Zn which is then inserted in a quartz ampoule together with Zn and As and the Zn diffused-in. Sn is evaporated on to the epitaxial surface and In is evaporated on to the surface of the substrate and both are alloyed in. The wafer is then subdivided by cleaving. Various other methods may be used including double diffusion, epitaxial growth, melt back, alloy-diffusion and diffusion followed by alloying. In a second embodiment, Fig. 2 (not shown), a tunnelling junction is produced by means of a point contact. In a third embodiment, Fig. 3 (not shown), the device comprises an abrupt PN junction diode which may be constructed by depositing a layer of N type GaAs doped with Sn on a polished and etched (100) face of a P type GaAs substrate doped with Zn by a solution growth method. The surfaces are lapped and nickel plated, the wafer is heated and then the surfaces are plated with Ni and Au. The wafer is then cleaved into squares or rectangles to form individual diodes which are soldered to the end of a Cu stem and mounted in a resonator, Fig. 7 (not shown). In a further embodiment a PIN structure is used in which the PI and NI junctions are abrupt, Fig. 4 (not shown), and this may be approximated to by a graded junction diode, Fig. 5 (not shown). The semi-conductor material may be of InSb, GaP or Ge instead of GaAs or Si. |
