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发明名称
PLASMA ETCHING TREATMENT
摘要
申请公布号
JPH0750287(A)
申请公布日期
1995.02.21
申请号
JP19920070568
申请日期
1992.03.27
申请人
SUMITOMO METAL IND LTD
发明人
HISADA MASAHIRO;NAKAMURA SEIICHI
分类号
C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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