| 摘要 |
PROBLEM TO BE SOLVED: To provide an accelerometer which receives no influence owing to the flatness of an oscillation mass and an electric latching. SOLUTION: An optical semiconductor element 10 includes a substrate 11 having a surface 12; a light detector 13 supported by the substrate 11; and an oscillation mass 21 positioning on the surface 12 of the substrate 11, and positioning on a part of the light detector 13. The oscillation mass 21 has a hole 22 positioning on the base area 32 of the light detector 13, and the oscillation mass 21 is movable to the substrate 11 and to the light detector 13. |
