| 发明名称 |
LIGAND STABILIZED +1 METAL BETA-DIKETONATE COORDINATION COMPLEXES AND THEIR USE IN CHEMICAL VAPOR DEPOSITION OF METAL FILMS |
| 摘要 |
2090038 9207971 PCTABS00013 Chemical vapor deposition precursors for depositing copper, silver, rhodium and iridium metals on substrates comprise ligand stabilized +1 metal beta-diketonate coordination complexes of said metals. Uses of such precursors in CVD processes are also provided.
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| 申请公布号 |
CA2090038(A1) |
申请公布日期 |
1992.04.25 |
| 申请号 |
CA19912090038 |
申请日期 |
1991.01.23 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BAUM, THOMAS H.;LARSON, CARL E.;REYNOLDS, SCOTT K. |
| 分类号 |
C07F1/08;C07F1/10;C07F9/02;C07F9/50;C07F15/00;C23C16/18;C23C16/48;C23C16/50;H01L21/285;H05K3/40;(IPC1-7):C07F1/00;C23C4/02;B05D3/00;B01J19/12 |
主分类号 |
C07F1/08 |
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