| 摘要 |
PURPOSE:To restrain exciting force of a frame at the polishing time of a plate like body, by imparting to the frame a braking force exceeding the exciting force generated at the rocking motion time of the frame. CONSTITUTION:A polishing member 40 is provided capably of its eccentric rotating motion on a frame 12 rocking in the direction orthogonal with the transfer difection B of a plate like body 90, the polishing member 40 is subjected to an eccentric rotation motioning in the state of pressing the polishing member 40 to the plate like body 90 and also subjected to rocking motion in the direction orthogonal with the transfer direction 13 of the plate like body 90 to polish the plate like body 90. In this case, the braking force exceeding the exciting force generated at the rocking motion time of the frame 12 is imparted to the frame 12 by a brake 78. The exciting force of the frame can thus be restrained at the polishing time of the plate like body. |
