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发明名称
HIGH-FREQUENCY OXIDATION
摘要
申请公布号
JPH02206119(A)
申请公布日期
1990.08.15
申请号
JP19890027976
申请日期
1989.02.06
申请人
NEC CORP
发明人
HAYAMA HIROSHI
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
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地址
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