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发明名称
用于有机材料之压力计
摘要
本发明提供一种用于量测在形成一设备之一层之过程中使用之汽化有机或无机材料之压力的派蓝尼型真空计,其包括:一延长的长丝,其具有5微米或更小之一厚度且具有一大于0.0035/℃之电阻温度系数,该长丝附属于该汽化有机或无机材料;一用于将一电流施加至该长丝使得该长丝之温度小于650℃以不退化该有机材料之分子结构的结构;及一回应于电阻之一改变或电流之一改变以判定自该长丝之热损失的结构,该热损失为该汽化有机或无机材料之该压力的一函数。
申请公布号
TW200817660
申请公布日期
2008.04.16
申请号
TW096131914
申请日期
2007.08.28
申请人
柯达公司
发明人
麦可 龙
分类号
G01L21/12(2006.01)
主分类号
G01L21/12(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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