发明名称 INSPECTION METHOD OF LIGHT TRANSMISSIVE BODY, INSPECTION DEVICE, INSPECTION PROGRAM AND RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide an inspection method for inspecting fine defects by imaging transmitted light through a light-transmitting body, such as a glass tube, an image processing algorithm of the picked-up image, and to provide a device using them. SOLUTION: A slit light 5L is used as illumination light, and the slit light 5L is set so as to be in parallel with the rotation axis of an inspection object 1 or to intersect with the rotation axis in the horizontal direction.
申请公布号 JP2002156337(A) 申请公布日期 2002.05.31
申请号 JP20000349235 申请日期 2000.11.16
申请人 TOSHIBA CORP 发明人 MIYAUCHI TAKASHI
分类号 G01N21/896;(IPC1-7):G01N21/896 主分类号 G01N21/896
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