METHOD FOR FORMING PERPENDICULAR MAGNETIZATION MAGNETIC TUNNEL JUNCTION ELEMENT, AND DEVICE OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To enhance perpendicular magnetic anisotropic energy of a perpendicular magnetization MTJ element.SOLUTION: A method of forming a perpendicular magnetization tunnel junction element includes a step for forming a tunnel barrier layer on the first magnetic layer of an object to be processed, a step for cooling the object to be processed on which the tunnel barrier layer is formed, and after the cooling step, a step for forming a second magnetic layer on the tunnel barrier layer.SELECTED DRAWING: Figure 1