| 摘要 |
PURPOSE:To obtain the pellicle which does not contain a solvent and has good weatherability by forming a film in a film forming atmosphere filled with the same solvent as the solvent of the film forming material at the time of forming the film by a spin coater. CONSTITUTION:A substrate 3 for film formation, such as quartz plate, is superposed on a rotary stage 2 and is housed in a chamber 1. A dropping nozzle 4 for dropping a film forming material soln. prepd. by dissolving the film forming material into the solvent onto the substrate 3 for film formation is provided and after the film forming material soln. is dropped from the dropping nozzle 4 onto the substrate 3 for film formation, a cap 5 is closed and the chamber 1 is internally hermetically sealed. After air is removed from a discharge port 6, gaseous nitrogen is sent from a gas feed port 7 into the chamber and gaseous nitrogen is fed from a gas feed port 8. The solvent housed in a liquid storage tank 9 is evaporated and this solvent is admitted into the chamber. The rotary stage 2 is then rotated to spread the dropping liquid on the substrate 3 and thereafter, the cap 5 is opened and the solvent is evaporated by increasing the rotating speed of the rotary stage 2. |
