| 发明名称 |
FABRICATION OF A MICROCHANNEL PLATE FROM A PERFORATED SILICON WORKPIECE |
| 摘要 |
Manufacture of a microchannel plate may be improved using photoelectrochemic al etching and thin film activation such as CVD and nitriding and oxidizing wal l surface portions (28) of pores (12) formed in the substrate (10). The pore pattern may be changed by oxidizing and etching the substrate prior to activation.
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| 申请公布号 |
CA2229717(A1) |
申请公布日期 |
1997.02.13 |
| 申请号 |
CA19962229717 |
申请日期 |
1996.07.25 |
| 申请人 |
CENTER FOR ADVANCED FIBEROPTIC APPLICATIONS A/K/A CAFA |
发明人 |
SOAVE, ROBERT J.;TASKER, G. WILLIAM;THEN, ALAN M.;SHANK, STEVEN M. |
| 分类号 |
H01J9/12;(IPC1-7):B44C1/22;C03B15/00;H01L21/00 |
主分类号 |
H01J9/12 |
| 代理机构 |
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