发明名称 MANUFACTURE AND MANUFACTURING EQUIPMENT FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit device and its manufacturing method using a coated bonding wire capable of efficiently performing wire bonding. SOLUTION: A coated bonding wire 13 has an amount of melting of a covered film 13 less than 300μm during the formation of a ball 13c due to electric sparks, and the core wire 13a of a coated resin can be protected at least from one of undesirable matters, filling-up of a resin, carbonization and sticking to a ball. The ball 13c is formed to a proper shape by electric spark at a time. A discharge time during ball formation is 0.5 to 3.0ms.
申请公布号 JPH09260414(A) 申请公布日期 1997.10.03
申请号 JP19960122066 申请日期 1996.05.16
申请人 HITACHI LTD 发明人 AKIYAMA YUKIJI;MIMATA TSUTOMU
分类号 H01L21/60 主分类号 H01L21/60
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