| 摘要 |
PURPOSE:To recognize the attitude of a body readily in a short time without the position detection of a gaging mechanism when the position of the body to be recognized such as a semiconductor part is aligned. CONSTITUTION:The image signals outputted from an image sensing device 5 are converted into the binary-coded or multiple-coded image data with image converting means 11 and 13. Scannings are performed for the binary-coded image data with coarse-attitude detecting means 11 and 13 at a coarse interval. The characteristic-candidate points of the body to be recognized are extracted from the result of the scannings and the shape data of the body to be recognized, and the coarse attitude is obtained. Thereafter, the scannings are performed for the multiple-coded image data with main-attitude detecting means 11 and 13 based on the coarse attitude. Thus, the defect for the body to be detected is detected, and the attitude is measured. |
