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发明名称
METHOD OF MAKING ULTRAPURE SILICON NITRIDE/OXYNITRIDE POWDER
摘要
申请公布号
EP0227324(B1)
申请公布日期
1992.06.03
申请号
EP19860309264
申请日期
1986.11.27
申请人
FORD MOTOR COMPANY LIMITED;FORD-WERKE AKTIENGESELLSCHAFT;FORD FRANCE SOCIETE ANONYME
发明人
BECKWITH, ELAINE CECILIA;WILLIAMS, ROBERT MANTELL
分类号
C01B21/068;C01B21/082;C04B35/584;C04B35/593;C04B35/626
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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