CAPACITANCE ELEMENT AND ITS MANUFACTURE

摘要

PURPOSE:To obtain a capacitance element in which the resistance value of a first electrode and a second electrode is low and whose capacity is high by a method wherein the first electrode having a recessed and protruding surface is formed on an insulating substrate, a dielectric film is formed so as to be a recessed and protruding face corresponding to the recessed and protruding face of the first electrode and a second electrode which is faced with the first electrode is formed. CONSTITUTION:As a first electrode, a first conductive layer 2 is formed on an insulating substrate 1; a second conductive layer 8 is formed on it. A first mask layer is formed on it; a third conductive layer 7 having a recessed and protruding face is formed by making use of the first mask layer as a mask by an electrolytic plating operation which uses the second conductive layer 8 as an electrode for electrolytic plating use. A dielectric film 9 is formed on the first electrode so as to have a recessed and protruding face. A second mask layer having a window is formed on the dielectric film 9; a fourth dielectric layer is formed by making use of it as a mask; a fifth conductive layer 15 is formed on it by an etching treatment using a third mask layer as a mask; a second electrode is formed.