| 摘要 |
PURPOSE:To remove oxides in a sintered material and obtain a sintered compact having high thermal conductivity by sintering a formed ceramic material composed mainly of AlN in a baking vessel composed mainly of AlN, etc., and containing a specific amount of graphite as a subsidiary component. CONSTITUTION:A baking vessel 3 is formed by using a sintered compact composed mainly of AlN and/or BN and containing 5-20wt.% of graphite as a subsidiary component. A formed ceramic material 4 composed mainly of AlN is put into the vessel 3 and sintered in non-oxidizing atmosphere to deoxidize the surface of the formed material and reduce the oxide in the grain boundary phase to decrease the grain boundary phase in the sintered material. The residual oxide inhibiting thermal conduction can be decreased by this treatment to obtain a sintered ceramic material having high thermal conductivity. |
