ALIGNMENT KEY FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An alignment key for fabricating a semiconductor device is provided to precisely analyze the center position of a trench by forming the first alignment key composed of a plurality of trench-type fine patterns so that a thin film like a tungsten layer is uniformly formed in the trench of the first alignment key by a predetermined thickness. CONSTITUTION: The alignment key for fabricating the semiconductor device is composed of a plurality of the trench-type fine patterns that are separated from one another. The alignment key is of a bar type, disposed as a quadrangular shape. A thin film is formed on the alignment key and a photoresist pattern of a box type is formed inside the alignment key disposed as a quadrangular shape.