| 摘要 |
<p>PURPOSE:To provide such a highly reliable device that dispenses with a trouble some working process and is compact in size, excellent in mass-productibility as well as no characteristic deterioration by temperature change, by forming a pair of detecting electrodes in the side of a triangular-prismatic vibrator consisting of piezoelectric material and an earth electrode in this vibrator, respectively. CONSTITUTION:Each of detecting electrodes 13, 14 are formed in two side faces of a triangular prismatic vibrator 12 constituted of piezoelectric ceramics and a feedback electrode 15 in a side face 12c, respectively, and in addition, an earth electrode 16 is formed in a central part in the vibrator 12 in form of an internal electrode, extending it in the axial direction of the vibrator 12. The electrodes 13, 14 detect an output difference based on the value of kink out of a main shaft at a time when the vibrator 12 has vibrated, and the electrode 15 stabilizes an oscillating state. Since the vibrator 12 itself is composed of piezoelectric ceramics and each of the electrodes 13-15 consists of a metal film, fine working and lamination are all unrequired, thus a small piezoelectric vibrogyro 11 is easily securable.</p> |
