| 摘要 |
<p>PURPOSE:To provide a sliding guide device simple in structure, excellent in damping properties and is suitable for highly accurate positioning, and thereby provide a table device employing the device which can perform positioning at high speed with high accuracy. CONSTITUTION:The sliding guide device is provided with the slide member 1 sliding along a guiding surface 10, which is supported movably in the sliding direction against the mounting section 4 of a table 4 by a link 3 having each elastic hinge 2 as a joint, a stopper limiting the upper limit of relative variation between the mounting section 4 and the slide member 1, and with a damper 5 interposed between the mounting section 4 and the slide member 1. The device is equipped with the table 11 guided by the sliding guide device, its drive device, and a measuring device measuring the position of the table. The device is furthermore equipped with a determiner, a numerical value generator, a code converter, and with an input terminal so that the drive device is controlled based on the deviation signal between a target value for table positioning and the output of the measuring device.</p> |
