| 摘要 |
PURPOSE: A device for exposing LCD reduces the number of accessories and prevents the dust from being made by structuring the stage operation means as the step motor control system. CONSTITUTION: A device comprises a host computer(1), a reticle stage controlling part(3),a reticle stage part(5), a stage controlling part(7), a plate stage part(9), an optical controlling part(11), an optical part(13), a plate mounting/eliminating controlling part(15), and a plate mounting/eliminating operation part(17). The reticle stage controlling part(3) is connected to the host computer(1) through the protocol and controls the operation of mounting and eliminating the reticle at the reticle stage of the reticle stage part(5). The plate mounting/eliminating controlling part(15) controls the plate mounting/eliminating operation part(17). The plate stage part(7) arrays the plate stage of the plate stage part(7) and the plate which is on the plate stage part through the plate surface linear motor control. The optical controlling part(11) controls the optical part(13).
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