APPARATUS FOR CLEANING WAFER,申请号JP19860242103-传众专利搜索

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发明名称	APPARATUS FOR CLEANING WAFER
摘要
申请公布号	JPS6396925(A)	申请公布日期	1988.04.27
申请号	JP19860242103	申请日期	1986.10.14
申请人	ULVAC CORP	发明人	MAEBA YOSHIYASU
分类号	H01L21/304;B08B3/12	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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