ROENTGENSTRAHL-LITHOGRAPHIE.,申请号DE19843485072-传众专利搜索

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发明名称	ROENTGENSTRAHL-LITHOGRAPHIE.
摘要
申请公布号	DE3485072(D1)	申请公布日期	1991.10.24
申请号	DE19843485072	申请日期	1984.05.26
申请人	THE UNIVERSITY OF ROCHESTER, ROCHESTER, N.Y., US	发明人	YAAKOBI, BARUKH, ROCHESTER NEW YORK 14618, US
分类号	G03F7/20;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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