发明名称 ADJUSTING TOOL OF MICROWAVE DEVICE AND SUPERCONDUCTING CIRCUIT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide the adjusting tool of a microwave device and a superconducting circuit device capable of adjusting the microwave device while cooling it, and of greatly shortening a time taken for the adjustment work in view of solving the problem in a conventional adjusting method of a microwave device that the device can not be adjusted unless it is once returned to room temperature and much time is required for the adjustment work. SOLUTION: The adjusting tool of a microwave device and the superconducting circuit device are configured such that a hole 52 having a size of covering a distribution range of a plurality of trimming rods (adjusting part) 11 provided on the microwave device 1 is provided in a plate-shaped cover (first cover ) 5b for covering a chamber 4 on which the microwave device 1 is mounted, a movable plate-shaped cover (second cover ) 6 for covering the hole 52 is mounted on the cover 5b, an adjusting driver (adjusting means) 50 is attached to the movable cover 6, and further a movement mechanism is provided for moving the movable cover 6 on the cover 5b. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005209911(A) 申请公布日期 2005.08.04
申请号 JP20040015347 申请日期 2004.01.23
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 UCHIDA TAKASHI;SUDO MASAKI;KAGAYA NORIYUKI
分类号 H01L39/04;H01L39/02;(IPC1-7):H01L39/04 主分类号 H01L39/04
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