| 摘要 |
PROBLEM TO BE SOLVED: To eliminate existing inconvenience such as decrease in laser output and make laser heating possible. SOLUTION: The vacuum processing device is used for vapor deposition while heating a substrate in a vacuum chamber having an optically transparent window in a part thereof. In the vacuum processing device, a holding section for holding the substrate and the optically transparent window are connected in a linear interspace, which is isolated from other places of the chamber. A laser oscillator is arranged outside the optically transparent window and irradiates a laser beam to the substrate through the linear interspace to heat the substrate. COPYRIGHT: (C)2008,JPO&INPIT
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