| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an alternate stripe electrode, where first stripe electrodes which allow a prescribed electromagnetic wave to pass through and second stripe electrodes which intercept the electromagnetic wave and consist of many linear electrodes are alternately arranged approximately in parallel, from one mask for stripe electrode by self-matching (without mask alignment). SOLUTION: Individual linear electrodes 12a of second stripe electrodes 12 are formed on the upper face of a support body 10, and a transparent conductive film 16 is uniformly formed on the upper face of the support body 10 and that of the second stripe electrodes 12, and a resist film 18 is uniformly formed on the upper face of the transparent conductive film 16, and the support body 10 is exposed to ultraviolet rays from below, and then the ultraviolet rays are intercepted by the second stripe electrodes 12 but are transmitted through the transparent conductive film 18 to form a resist pattern 18a by exposure of the resist film 18, and the transparent conductive film 16 is etched in accordance with the resist pattern 18a to separate the second stripe electrodes 12 and the transparent conductive film 16, and thus the first stripe electrodes are formed. |
