| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection method and device with excellent detection capability of surface defect. SOLUTION: In this surface inspection method for detecting a surface detect of an inspection object 40, the surface of the inspection object 40 is illuminated so that a bright area 11 having a predetermined broadening and a dark area 21 darker than the bright area 11 and having a predetermined broadening equal to or different from that of the bright area 11 are formed, and a continuous detection area 31 passing the bright area 11, the dark area 21 and the boundary area 22 of the both is imaged by a line sensor camera 30. COPYRIGHT: (C)2005,JPO&NCIPI
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