发明名称 |
COMBINATORIAL PROCESSING INCLUDING STIRRING |
摘要 |
<p>Combinatorial processing including stirring is described, including defining multiple regions of a substrate, processing the multiple regions of the substrate in a combinatorial manner, introducing a fluid into a first aperture at a first end of a body to dispense the fluid out of a second aperture at a second end of the body and into one of the multiple regions, and agitating the fluid using an impeller at a second end of the body to facilitate interaction of the fluid with a surface of the substrate.</p> |
申请公布号 |
WO2008157130(A1) |
申请公布日期 |
2008.12.24 |
申请号 |
WO2008US66424 |
申请日期 |
2008.06.10 |
申请人 |
INTERMOLECULAR, INC.;FRESCO, ZACHARY;KUMAR, NITIN |
发明人 |
FRESCO, ZACHARY;KUMAR, NITIN |
分类号 |
H01L21/205;H01L21/31;H01L21/316 |
主分类号 |
H01L21/205 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|