发明名称 COMBINATORIAL PROCESSING INCLUDING STIRRING
摘要 <p>Combinatorial processing including stirring is described, including defining multiple regions of a substrate, processing the multiple regions of the substrate in a combinatorial manner, introducing a fluid into a first aperture at a first end of a body to dispense the fluid out of a second aperture at a second end of the body and into one of the multiple regions, and agitating the fluid using an impeller at a second end of the body to facilitate interaction of the fluid with a surface of the substrate.</p>
申请公布号 WO2008157130(A1) 申请公布日期 2008.12.24
申请号 WO2008US66424 申请日期 2008.06.10
申请人 INTERMOLECULAR, INC.;FRESCO, ZACHARY;KUMAR, NITIN 发明人 FRESCO, ZACHARY;KUMAR, NITIN
分类号 H01L21/205;H01L21/31;H01L21/316 主分类号 H01L21/205
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