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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0387069(A)
申请公布日期
1991.04.11
申请号
JP19890093025
申请日期
1989.04.14
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
SHIMIZU AKIHIRO;YAMANAKA TOSHIAKI;HASHIMOTO NAOTAKA;TAKEDA EIJI
分类号
H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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