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发明名称
COUNTING APPARATUS OF WAFER
摘要
申请公布号
KR0132409(Y1)
申请公布日期
1999.02.01
申请号
KR19950025788U
申请日期
1995.09.22
申请人
LG SEMICONDUCTOR CO., LTD.
发明人
JUN, YONG-JUN
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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