APPARATUS FOR BAKING SEMICONDUCTOR WAFER,申请号KR19950013980U-传众专利搜索

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发明名称	APPARATUS FOR BAKING SEMICONDUCTOR WAFER
摘要
申请公布号	KR0131558(Y1)	申请公布日期	1999.02.01
申请号	KR19950013980U	申请日期	1995.06.20
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	CHO,. HEE-YUN;KIM, SUNG-ILL
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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