APPARATUS AND METHOD FOR EXTRACTING TEST RESULT DATA

摘要

The present invention relates to a test data extracting device which can reduce test data extraction time of a three-dimensional semiconductor. According to an embodiment of the present invention, the test data extracting device includes: a check data generation unit (120) which uses test result values regarding through electrodes in through electrode groups to generate check data indicating defect states of the through electrode groups; a control unit (160) which selects a through electrode group to extract test result values by using the check data and outputs an activation signal to the selected through electrode group; and an extracting unit (180) which extracts the test result values according to the activation signal.