| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid filling apparatus in which the opening degree adjustment of a throttle valve can be controlled numerically, the opening/closing adjustment thereof can be performed with high precision, with high reproducibility and in a short time, and liquid filling can be performed excellently.SOLUTION: The liquid filling apparatus includes: a tank 2 for storing a liquid L to be filled; a filling nozzle 3 for injecting the liquid L into a container A; a liquid flow passage 5 arranged between the tank 2 and the filling nozzle 3; and a filling valve 6 which is driven by a fluid actuator 14 and used for opening and closing the liquid flow passage. Throttle valves 21, 22 for controlling the amount of a hydraulic fluid to be supplied and discharged are arranged on a first fluid flow passage 19 and a second fluid flow passage 20, respectively, through which the hydraulic fluid is supplied discharged to/from the fluid actuator 14 to drive an output plunger 15 forward and backward. An electric actuator is arranged for numerically controlling the opening/closing degree of each of the throttle valves 21, 22. |
