ALUMINUM NITRIDE SINTERED BODY AND CERAMIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic heater that is superior in strength such as bending strength and is prevented from contaminating a silicon wafer with particles. SOLUTION: In a ceramic substrate with conductors formed on its inside or its surface, the ceramic substrate shows the property of breaking in a particle and an average particle diameter of the ceramic particles is equal to or less than 3 μm.