| 摘要 |
PURPOSE:To furnish a limiting current type oxygen sensor of a thin film type which enables attainment of an excellent limiting current characteristic. CONSTITUTION:A Pt anode electrode 2 is formed on the whole surface of a compact insulative base 1 and a ZrO2-Y2O3 film 3 being an oxide ion conductor is formed thereon with a comb-shaped pattern. On this ZrO2-Y2O3 film 3, a Pt cathode electrode 4 is formed in lamination with a reduced pattern of the ZrO2-Y2O3 film 3 and, moreover, a gas diffusion layer 5 is formed with the same pattern as the ZrO2-Y2O3 film 3 so that it covers the cathode electrode 4. |
