| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated structure of nanoparticles and a method for producing it. SOLUTION: The laminated structure of the nanoparticles comprises a substrate, the nanoparticles formed on the substrate wherein the nanoprticles contain a silicide. The method for producing it comprises the steps of forming a silicon source layer having a thickness corresponding to its size so as to form the nanoparticls of a required size, forming the nanoparticles comprising a predetermined metal and silicon, vapor-depositing the nanoprticles on the silicon source layer, and forming the silicide by growing the nanoparticles. Thus the nanoparticls of a required size is easily obtained since a size of the nanoparticles is adjusted by adjusting a thickness of the silicon source layer. COPYRIGHT: (C)2007,JPO&INPIT |
