| 摘要 |
PROBLEM TO BE SOLVED: To provide a neutral particle beam generator which generates neutralizing beams of identical energy. SOLUTION: The neutral particle beam generator has an ionization source which produces plasma and emits ion particles; a pulsing means which pulses ion beams, a multi-charged ion particle removing means which removes multiply-charged ion particles from the ion beams; a neutral particle generation means which neutralizes the ion particles to generate neutral particles; a removal means which removes other particles contained in the neutral particles generated by the neutral particle generation means; and a processing means for irradiating with the neutral particle beams from which the other particles are removed. COPYRIGHT: (C)2008,JPO&INPIT
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