MEMS microphone

摘要

Mechanical resonating structures, as well as related devices and methods of manufacture. The mechanical resonating structures can be microphones, each including a diaphragm and a piezoelectric stack. The diaphragm can have one or more openings formed therethrough to enable the determination of an acoustic pressure being applied to the diaphragm through signals emitted by the piezoelectric stack.

主权项

1. An electroacoustic device, comprising:
a substrate having a cavity formed therein; a diaphragm disposed over the cavity in the substrate, the diaphragm being configured to vibrate in response to an acoustic pressure applied thereto; and a piezoelectric stack disposed in proximity to the diaphragm, the piezoelectric stack being configured to sense the acoustic pressure applied to the diaphragm.