| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an array type ultrasonic wave generating element hardly causing the warp or crack of a vibrator and satisfactory in respective characteristics of an array vibrator by using a piezoelectric single crystal made of a perovskite compound. SOLUTION: This manufacturing method consists of a process where a piezoelectric single crystal 1 composed of a perovskite compound is bonded on a support substrate 3, a process where the piezoelectric single crystal 1 is diced in an array to form a piezoelectric single crystal vibrator, and a process where polarization processing is applied to the piezoelectric single crystal vibrator. Thus, in the case of manufacturing the array type ultrasonic wave generating element by using the single crystal vibrator, the ultrasonic wave generating element satisfactory in characteristics of the vibrator can be manufactured and the production yield of the element is drastically improved. This invention is especially effective to the case that the thickness of the single crystal vibrator is especially 0.5 mm or below. |
