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发明名称
VERFAHREN ZUM HERSTELLEN EINER HALBLEITERANORDNUNG
摘要
申请公布号
DE2021922(B2)
申请公布日期
1972.11.16
申请号
DE19702021922
申请日期
1970.05.05
申请人
发明人
分类号
H01L21/00;H01L23/29;H01L23/485
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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