| 摘要 |
PURPOSE:To remove deflection strain of a deflector generated at the time of stereoscopic observation of an image by making to change a scanning signal corresponding to two refracted directions and the scanning signal of the means of two-dimensionally scanning the refracted electron rays on the sample surface. CONSTITUTION:Electron rays scan a sample 4 two-dimensionally by a deflector 8 for scanning thus being able to perform image observation while being electrically controlled by both of a generator 11 of a deflection signal for scanning and the generator 12 of the signal for refraction synchronized therewith. The signal of said generator 11 is connected with the deflector 8 through a function generator 10. Said function generator 10 can thereby remove deflection strain characteristic to the deflector. Thereby, measurement with extremely high accuracy can be performed when measuring the height of the sample surface. |
