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发明名称
MULTILAYER INTERCONNECTION
摘要
申请公布号
JPH02307247(A)
申请公布日期
1990.12.20
申请号
JP19890129413
申请日期
1989.05.23
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
H01L23/522;H01L21/768
主分类号
H01L23/522
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代理人
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地址
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