摘要 |
<p>PURPOSE:To obtain stable operation in ultra-high vacuum environment by subjecting a semiconductor ceramic having a suitable composition ratio of zinc oxide-titanium oxide-copper oxide to a baking process. CONSTITUTION:Zinc oxide, oxide copper and titanium oxide are prepared, and so blended as to obtain a semiconductor ceramic having a suitable composition ratio thereof. Then, the aforesaid materials are wet grindered and mixed, and further subjected to processes of dehydration, drying, pulverization and grading. A product so molded is baked in natural atmosphere, using an electric furnace, and a cylindrical semiconductor ceramic sample is thereby obtained.</p> |