| 摘要 |
<p>A method and an apparatus for modifying a surface material which can easily modify the characteristics of a surface material (e.g. control of the chemical composition of the surface material) and can develop a novel field of utilization of ultra-pure water. The method is characterized in that a surface material formed on a metal material is brought into contact with ultra-pure water in an oxygen-free atmosphere. The amount of eluted oxygen is preferably up to 1 ppm, and ultra-pure water is preferably boiled. The apparatus includes at least a chamber having inert gas introduction means for introducing an inert gas thereinto, and inert gas discharge means for discharging the inert gas therefrom, a container for ultra-pure water, disposed inside the chamber, for holding ultra-pure water, and means disposed in the chamber, for heating ultra-pure water held in the ultra-pure water container.</p> |
