| 发明名称 | MEMS grid for manipulating structural parameters of MEMS devices | ||
| 摘要 | A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device. | ||
| 申请公布号 | US9617142(B1) | 申请公布日期 | 2017.04.11 |
| 申请号 | US201514872123 | 申请日期 | 2015.09.30 |
| 申请人 | MEMS Drive, Inc. | 发明人 | Gutierrez Roman;Tang Tony;Liu Xiaolei;Wang Guiqin;Ng Matthew |
| 分类号 | B81B7/00;B81B7/02;B81C1/00;H01L23/00;H01L23/31 | 主分类号 | B81B7/00 |
| 代理机构 | Holland & Knight LLP | 代理人 | Colandreo Brian J.;Abramson Michael T.;Holland & Knight LLP |
| 主权项 | 1. A method of fabricating a MEMS device with controllable structural characteristics, comprising: identifying structural requirements of one or more structures of a MEMS device; determining a first geometric pattern; determining a second geometric pattern; and etching a plurality of holes into the MEMS device, wherein a first subset of the plurality of holes etched into the MEMS device corresponds to the first geometric pattern and a second subset of the plurality of holes etched into the MEMS device corresponds to the second geometric pattern. | ||
| 地址 | Arcadia CA US | ||