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经营范围
发明名称
ION MILLING DEVICE
摘要
申请公布号
JPH0336285(A)
申请公布日期
1991.02.15
申请号
JP19890170380
申请日期
1989.07.01
申请人
HITACHI NAKASEIKI LTD
发明人
NONAKA HIROTAKA
分类号
C23F4/00;G01N1/28;H01J37/20;H01J37/30;H01L21/302;H01L21/3065;H01L21/66
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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