CYLINDRICAL TARGET AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To extend the possibility of material selection for a target material and a backing tube supporting it in a cylindrical target to be used for a magnetron sputtering system, to simplify its manufacture and to attain its recycling. SOLUTION: The cylindrical target 14 can be obtained by joining a backing tube 16 made of metal as an internal cylinder and a cylindrical target material 20 as an external cylinder by interposing a shock-absorbing member 52 such as a carbon felt between them.