METHOD FOR EVALUATING RESISTANCE TO POWER SOURCE NOISE, AND PROBE AND SEMICONDUCTOR ELEMENT USED THEREIN

摘要

PROBLEM TO BE SOLVED: To easily determine a causative function block when a semiconductor element equipment with a plurality of function blocks has low resistance to power source noise. SOLUTION: The respective function blocks are taken one by one as the object of evaluation. Power source noise is imposed on a function block as the object of evaluation via an individual power supply line and on the other function blocks via a common power supply line. Based on a noise level when a malfunction occurs in the semiconductor element, a function block in question is determined. On that occasion, a power supply voltage V1 to the function block as the object of evaluation is made lower than a power supply voltage V2 to the other function blocks (V1<V2) to lower the noise resistance of the function block as the object of evaluation, thereby facilitating the occurrence of a malfunction owing to the power source noise.