发明名称 Information processing apparatus effecting probe position control with electrostatic force
摘要 <p>An information processing apparatus utilizing a scanning tunnel microscope includes a probe, a detector for detecting the distance between the probe and an object opposed thereto, based on a physical interaction working between the probe and the object, an electrostatic actuator for displacing the probe, for adjusting the distance between the probe and the object: The electrostatic actuator includes mutually opposed two electrodes: A controller is provided for controlling the amount of charge to be accumulated between the electrodes, so as to maintain a desired distance between the probe and the object, based on the result of detection by the detector. <IMAGE></p>
申请公布号 EP0722077(A3) 申请公布日期 1997.01.29
申请号 EP19960100370 申请日期 1996.01.11
申请人 CANON KABUSHIKI KAISHA 发明人 OGUCHI, TAKAHIRO;SAKAI, KUNIHIRO
分类号 G01N37/00;G01B7/34;G01B9/00;G01N27/00;G01Q10/04;G01Q60/10;G01Q60/16;G01Q80/00;G11B9/00;G11B9/06;G11B9/14;H01J37/28;(IPC1-7):G01B7/34 主分类号 G01N37/00
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