发明名称 Apparatus and method for detecting leakage in a gas reactor
摘要 The present invention discloses an apparatus and a method for detecting a gas leakage from a gas reactor by utilizing flow sensors mounted on and in fluid communication with a gas inlet conduit and a gas outlet conduit. The volume of gas flow through the inlet conduit and the outlet conduit are continuously monitored while the gas reactor is in its operating mode so that any gas leakage can be detected and the gas reactor can be shut off or bypassed in order to eliminate fire and safety hazards.
申请公布号 US5939618(A) 申请公布日期 1999.08.17
申请号 US19970908882 申请日期 1997.08.08
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 HU, TIEN J.;TSENG, JENG D.
分类号 C01B13/10;C01B13/11;G01M3/28;(IPC1-7):G01M3/26;B01D24/00;B01J14/08 主分类号 C01B13/10
代理机构 代理人
主权项
地址